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PRODUCT INFORMATION | TRACE-RITE® MINI |
RF-Based Endpoint Signals
Fast and Repeatable RF Endpoint Signals
TRACE-RITE® mini is a focused solution for etch or deposition tools with existing algorithmic capability. Unique signal conditioning capabilities allow TRACE-RITE mini to amplify small transitions in end point signals derived from FORTH-RITE 's proprietary RF transducers. TRACE-RITE mini is designed to install and operate seamlessly as an integral component of the process tool. Power and signal communications are made via existing connections on most platforms including all legacy Applied Materials CVD/PECVD platforms. The user can select from three measured values, "window" and amplify the transition to insure a robust signature for the endpoint algorithm. The signal may be amplified for either 0-5 V or 0-10 V input to the tool.
The transducers are mounted at the RF power point-of-use by simply affixing the package to the existing current carrier (zero insertion length). A digital readout provides a powerful tool that can be used for endpoint setup, tool health monitoring and chamber matching. TRACE-RITE mini works with all process chemistries and supports the FORTH-RITE flow-rate-optimized initiative for minimizing environmentally damaging emissions.
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TRACE-RITE® mini seamlessly integrates with Applied Materials CVD chamber software to provide impedance based endpoint detection. |
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Download the TRACE-RITE® Mini Sales Sheet PDF
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