Forth-Rite Technologies | Trace-Rite Mini Overview

RF-Based Endpoint Signals

Fast and Repeatable RF Endpoint Signals

TRACE-RITE® mini is a focused solution for etch or deposition tools with existing algorithmic capability. Unique signal conditioning capabilities allow TRACE-RITE mini to amplify small transitions in end point signals derived from FORTH-RITE 's proprietary RF transducers. TRACE-RITE mini is designed to install and operate seamlessly as an integral component of the process tool. Power and signal communications are made via existing connections on most platforms including all legacy Applied Materials CVD/PECVD platforms. The user can select from three measured values, "window" and amplify the transition to insure a robust signature for the endpoint algorithm. The signal may be amplified for either 0-5 V or 0-10 V input to the tool.

The transducers are mounted at the RF power point-of-use by simply affixing the package to the existing current carrier (zero insertion length). A digital readout provides a powerful tool that can be used for endpoint setup, tool health monitoring and chamber matching. TRACE-RITE mini works with all process chemistries and supports the FORTH-RITE flow-rate-optimized initiative for minimizing environmentally damaging emissions.

TRACE-RITE® mini seamlessly integrates with Applied Materials CVD chamber software to provide impedance based endpoint detection.

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TRACE-RITE

The TRACE-RITE® mini uses a novel "zero insertion length" transducer package to sample the RF power at the point of use then conditions the raw signals to provide a powerful endpoint transition signal for tool control. TRACE-RITE® mini supports the flow-rate-optimized initiative and includes a digital readout suitable for tool health monitoring or chamber matching.