Forth-Rite Technologies | Sense-Rite Product

Designed for either advanced plasma process or equipment control applications, SENSE-RITE® defines the state-of-the-art in RF sensor technology. It provides the highest level of functional integration with the minimum electrical length available.

SENSE-RITE® can be installed "post-match"" in the non-50 ohm environment at the "point-of-use" for RF power due to its flat VSWR of less than 1.05 at operating frequencies up to 60MHz.

It is ideal for both equipment manufacturer (OEMs) and end-user applications including:

End Point Detection
Closed-Loop Delivered Power
RF Power Delivery Network Analysis

SENSE-RITE® can also be integrated into other data acquisition systems for higher level fault detection and classification applications. The 5kW version of SENSE-RITE® is ideal for applications in semiconductor wafer processing. The 30kW version is designed for high power applications in FPD and solar manufacturing.

Proprietary process sensitive data is secured by an encrypted communication interface. SENSE-RITE® is fully contained in a single package for ease of installation in the manufacturing environment.

Download the Sense-Rite Sales Sheet PDF

SENSE-RITE

Key Capabilities Include:

RMS Voltage
RMS Current
Phase Angle
Delivered RF Power
Impedance
Patented "One-Box" Solution
Secure Digital Interface
Patented "On-Board" Calibration
Information Storage

The SENSE-RITE® product includes fully functional stand-alone software for data acquisition and viewing; hardware and software documentation; and a software-based sensor simulator for training purposes. Learn more

Installation kits are available for many different process tool configurations and applications (shown are Novellus Speed, C1 and C2 kits). Contact us for a list of currently available installation kits.