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SENSE-RITE |
Key Capabilities Include:
- RMS Voltage
- RMS Current
- Phase Angle
- Delivered RF Power
- Impedance
- Patented "One-Box" Solution
- Secure Digital Interface
- Patented "On-Board" Calibration
- Information Storage
The SENSE-RITE® product includes fully functional stand-alone software for data acquisition and viewing; hardware and software documentation; and a software-based sensor simulator
for training purposes. Learn more

Installation kits are available for many different process tool configurations and applications (shown are Novellus Speed,
C1 and C2 kits). Contact us for a list of currently available installation kits.
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