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June 26, 2006
Forth-Rite Technologies, LLC announces the release of its World Class RF Measurement and Control Systems product suite. Focusing on strategic applications in plasma processing and applying the next generation SENSE-RITE RF sensor technology, FORTH-RITE has developed three new systems for immediate deployment in the manufacturing environment.
TUNE-RITE® focused on the equipment engineering mission of tool/process recovery by providing a man-portable toolkit for complete analysis of the RF power delivery system on the process tool in the manufacturing environment. Measurements provide immediate information as to the health and performance of the generator, matching network and all RF connections in the power delivery path. Results include matching network efficiency which supports the ongoing factory chamber matching effort. The TUNE-RITE® kit deploys quickly and easily.
TRACE-RITE® is designed to provide real time RF based end point detection signals for either plasma etch or deposition chamber clean in either silicon or flat panel manufacturing. Web-enabled, TRACE-RITE® is designed to deploy easily and operate autonomously within the manufacturing environment. Data may be maintained locally or ported from the TRACE-RITE® unit for archival or post-process analysis. Two user configurable end point signals accommodate process dependency or multi-signal relationship analysis.
POWER-RITE® is unique in the world by providing the ability to safely shift the control of RF power from the generator to the point-of-use. Traditional open loop RF power delivery systems typically provide delivered power accuracy of 5 to 10% depending on generator, match and chamber conditions. Active point-of-use control technology enables POWER-RITE® to provide delivered power accuracy of less than 1% with existing power delivery technology (generator, match and chamber). Reductions in delivered power variability translate directly into enhanced process performance, more closely matched process chambers and quicker recovery from maintenance events.
All FORTH-RITE® products operate with robust yet intuitive software. Although PC compatible, FORTH-RITE® also provides a unique human interface product called DISPLAY MODULE. DISPLAY MODULE is packaged for the manufacturing environment and provides a touch screen platform to operate all FORTH-RITE® products. A powerful auto-configure routine recognizes FORTH-RITE® hardware autonomously and configures the software for the specific application.
In addition, FORTH-RITE® is making available the SENSE-RITE® software development kit (SDK) for creating custom application specific software. The SDK is a part of the SENSE-RITE® evaluation kit available from FORTH-RITE® or any of its distributors throughout the world. The evaluation kit contains all necessary hardware, software and documentation to create and deploy RF measurement applications.
Forth-Rite® has the commitment, experience, technology and intellectual property your application deserves. Put it to work for you today.
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